Publication
Review of Scientific Instruments
Paper

Correction for chromatic aberration in microscope projection photolithography

View publication

Abstract

We have measured the ultraviolet dispersion of several microscope objectives and we find that all of them are limited by axial chromatic aberration when used for polychromatic exposure of photoresist. We show how to measure and correct for the ultraviolet focus shift, and estimate the corrected resolution. Certain lenses are able to produce micron features over millimeter fields.

Date

Publication

Review of Scientific Instruments

Authors

Share