A. Reisman, M. Berkenblit, et al.
JES
The history and evolution of electron beam based contactless multichip module (MCM) test technology at IBM is described. The feasibility of a new contactless test method based on opens and shorts detection by means of the measurement of net capacitance is demonstrated. A case is given for the economic viability of a tester based on this technique.
A. Reisman, M. Berkenblit, et al.
JES
David B. Mitzi
Journal of Materials Chemistry
Hiroshi Ito, Reinhold Schwalm
JES
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007