Conference paper
Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
In the spirit of Wilkinson's [1, 2] backward error analysis, conditions are established under which a given approximate solution of a system of n linear equations with n unknowns is the exact solution of a modified system whose coefficients and right-hand sides are within a given neighborhood of those of the original system. © 1964 Springer-Verlag.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
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ICLR 2023
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
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SPIE Optical Science, Engineering, and Instrumentation 1998