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Thin Solid Films
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Comparison between amorphous Ni-Zr alloys formed by solid state reaction and by codeposition

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Abstract

We have studied three kinds of amorphous Ni-Zr alloy thin films, prepared by solid state reaction in layered nickel and zirconium films and by dual electron gun codeposition. The codeposited films have a homogeneous composition of Ni1Zr1 and Ni1Zr2. The reacted alloys have a composition gradient ranging roughly from Ni50Zr50 to Ni64Zr36. The alloys have been characterized by differential scanning calorimetry, in situ resistivity measurement, transmission electron microscopy and Rutherford backscattering spectra. A comparison has been made of the three kinds of amorphous alloys in terms of their stabilities, crystallization behavior and diffusion characteristics. © 1980.

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Thin Solid Films