Publication
Applied Physics B Photophysics and Laser Chemistry
Paper

CO2 laser cleaning of black deposits formed during the excimer laser etching of polyimide in air

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Abstract

Pulsed CO2 laser cleaning of black debris formed during the excimer laser ablation of polyimide in air is demonstrated. The 10.6 μm CO2 laser radiation is strongly absorbed in the debris but only weakly absorbed in polyimide thus enabling the clean removal of the debris without damaging the polyimide. © 1988 Springer-Verlag.

Date

01 Jan 1988

Publication

Applied Physics B Photophysics and Laser Chemistry

Authors

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