E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A general method for the synthesis of mixed sulfur-selenium analogs of bis(ethylenedithio)tetrathiafulvalene (ET) starting with tetrathiafulvalene (TTF) is described. Protecting the tetraseleno-TTF intermediate with trimethylsilylethoxymethyl (SEM) groups provided the key intermediate for the synthesis of ET analogs having the selenium atoms in the outer rings on a tetrathiafulvalene center. © 1987.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T.N. Morgan
Semiconductor Science and Technology