Conference paper
Some experimental results on placement techniques
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976
Leo Liberti, James Ostrowski
Journal of Global Optimization
Liat Ein-Dor, Y. Goldschmidt, et al.
IBM J. Res. Dev
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002