Lixi Zhou, Jiaqing Chen, et al.
VLDB
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Lixi Zhou, Jiaqing Chen, et al.
VLDB
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008
Xinyi Su, Guangyu He, et al.
Dianli Xitong Zidonghua/Automation of Electric Power Systems
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976