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Microlithography 1998
No abstract available.
Lewis W. Flanagin, Christopher L. McAdams, et al.
Microlithography 1998
Jean M. J. Fréchet, Francine Bouchard, et al.
Polymer Journal
Peng Wu, Alina K. Feldman, et al.
Angewandte Chemie - International Edition
Donald C. Hofer, Robert D. Miller, et al.
Proceedings of SPIE 1989