Accounts of Chemical Research

Paper

01 Jun 1994

Chemical Amplification in High-Resolution Imaging Systems

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Abstract

No abstract available.

Paper

Characterization of a Novolac-Based Three-Component Deep-UV Resist

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Chemistry of Materials

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Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution

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Journal of Materials Chemistry

Paper

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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

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