Advances in Semiconductors and Semiconductor Structures 1987
Conference paper

Characterization of logic devices with photoconductively generated picosecond pulses

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Photoconductive picosecond electrical pulse generators and photoconductive sampling gates are ideally suited to the characterization of high speed logic devices, particularly silicon devices, and of VLSI wiring structures. We review in this paper the fabrication of photoconductive switches compatible with the silicon device technologies and some of their applications to the characterization of high speed devices.