Carbon overcoat: Structure and bonding of Z-DOL

Abstract

Carbon films (∼100 Å thick) sputter-deposited on silicon coupons were examined by ESR. Based on the results obtained and conclusions reported earlier in the literature, it is concluded that sputter-deposited carbon films are best described as stacks of closely packed spheroidal granules with diametric dimension of several nanometers. Individual granules would have either the graphitelike or diamondlike bonding scheme, and dangling bonds are hosted in the diamondlike granules. Z-DOL bonding occurs when a hydrogen atom is transferred from the hydroxyl group of Z-DOL to a dangling bond. The effect of exposing freshly prepared carbon film to Z-DOL vapor without prior exposure to air, the effect of argon pressure during sputtering, the effect of discharge current, and the effect of hydrogen or nitrogen in the discharging media (argon) are discussed and/or analyzed in terms of the granular structural model. © 2002 Plenum Publishing Corporation.