Ling Li, Michael Engel, et al.
ACS Nano
CNT-based complementary logic using low-temperature processed end-boned metal contacts are demonstrated. This new form of end-bonded contact is made by carbon dissolution into metal contacts with high carbon solubility (e.g., Ni and Co), which requires only low annealing temperature (400-600 °C). As-fabricated end-bonded Ni contacts serve as robust p-type contacts to CNTs and perform better than standard Pd side-bonded contacts at scaled dimensions. In addition, stable NFETs are converted from PFETs using Al2O3 as an n-type physicochemical doping layer. CMOS inverters are further built with end-bonded contacts for both PFETs and NFETs, featuring the smallest contact size thus far for CNT inverters. These new findings could pave the way to realizing CNT-based scalable CMOS technology.
Ling Li, Michael Engel, et al.
ACS Nano
Zhaoying Hu, Jose Miguel M. Lobez Comeras, et al.
Nature Nanotechnology
F. Menges, Fabian Motzfeld, et al.
IEDM 2016
Wei Sun, Jie Shen, et al.
Science