William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
This paper compares on-wafer thru-reflect-line (TRL) and off-wafer short-open-load-thru (SOLT) and line-reflect-reflect-match (LRRM) vector-network-analyzer probe-tip calibrations for amplifier characterization and parasitic-extraction calibrations for transistor characterization on silicon integrated circuits at millimeter-wave frequencies. We show that on-wafer calibrations generally outperform off-wafer and LRRM probe-tip calibrations at millimeter-wave frequencies. However, certain parasitic-extraction algorithms designed specifically to remove contact pads, transmission-lines, and access vias correct for much of the error in off-wafer calibrations. © 2014 IEEE.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings