Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Bourdon gauge pressure measurements of samples of GeCl4(g) and GeC14(g) plus Ge(s) have been made in the temperature range 300°1300°K The pressure change of pure GeCl4 as a function of temperature indicates that it does not dissociate up to 1300° The pressure vs. temperature behavior of GeCl4 (g) plus Ge (s) is described by the equilibrium [formula ommited> The standard enthalpy, ΔH°, and entropy, ΔS°, of reaction at 723°K were found to be 34.9 kcal and 46.7 eu, respectively. © 1965, The Electrochemical Society, Inc. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
A. Reisman, M. Berkenblit, et al.
JES
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials