Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper we consider a special kind of binary trees where each right edge is associated with a positive number α and each left edge with a positive number β(α ≦ β). Given α, β and the number of nodes n, an optimal tree is one which minimizes the total weighted path length. An algorithm for constructing an optimal tree for given α, β, n is presented, based on which bounds for balances and total weighted path lengths of optimal trees are derived. © 1977 BIT Foundations.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
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IEEE International Symposium on Information Theory - Proceedings
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UAI 2011