Ballistic nanoindentation of polymers

Indentation of a sharp (20 nm) cantilevered silicon tip into a polymer (SU8) surface is analyzed experimentally and through finite-element simulations. A rate effect on the microsecond scale that eases indentation is found, in contrast to the commonly observed hardening at high strain rates. The observed rate effect is discussed in terms of adiabatic heating and inertial force overshoot. The estimated magnitude of adiabatic heating is marginal, but the force overshoot itself is large enough to explain the data. The data imply that topographic patterning of a polymer at megahertz rates is feasible. © 2008 American Institute of Physics.