Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present an algorithm for self-consistent solution of the Poisson and Schrödinger equations in two spatial dimensions with open-boundary conditions to permit current flow. The algorithm works by discretely sampling a device's density of states using standing wave boundary conditions, decomposing the standing waves into traveling waves injected from the contacts to assign occupancies, and iterating the quantum charge with the potential to self-consistency using a novel hybrid Newton-Broyden method. A double-gate FET is simulated as an example, with applications focused on surface roughness and contact geometry. © 2002 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Heinz Koeppl, Marc Hafner, et al.
BMC Bioinformatics