William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
N.K. Ratha, A.K. Jain, et al.
Workshop CAMP 2000
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009