Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
David B. Mitzi
Journal of Materials Chemistry
K.A. Chao
Physical Review B