About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Review of Scientific Instruments
Paper
An x-y-z stage for scanning proximity microscopes using elastic elements
Abstract
A stage design is presented that allows coarse motion of the sample in an STM-type instrument. The stage utilizes the bending motion of springs driven by micrometers to achieve coarse motion in x, y, and z, and has no sliding parts other than the micrometers themselves. The design is compact, precise, and has excellent vibration and thermal drift characteristics. © 1991, American Institute of Physics. All rights reserved.