Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Michael D. Moffitt
ICCAD 2009
B. Wagle
EJOR