S.J. Koester, K.L. Saenger, et al.
IEEE Electron Device Letters
Paper
An interferometric calorimeter for thin-film thermal diffusivity measurements
Abstract
We demonstrate that the thermal diffusivity of thin-film samples bonded to transparent substrates can be measured from the phase lag of thermal waves propagating from the sample surface into the substrate. The thermal waves are detected from the substrate's interferometrically modulated reflectance. This technique is used to determine the thermal diffusivity of 5-μm-thick polymer films.
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