Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Gilbert's algorithm for computing optimal controls for systems with lumped parameters is extended to a class of control problems for systems with distributed parameters. It is also shown that the algorithm can be used to solve a larger class of problems in systems with lumped parameters than was originally considered by Gilbert. © 1971 Plenum Publishing Corporation.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering