Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
An explicit procedure for obtaining discrete approximations to general, nonlinear, fixed-time, continuous, optimal control problems with no intermediate trajectory constraints is presented. It is proved that, if the associated system of differential equations is linear in the control variable, then the optimal solutions of these approximations converge to extremals of the original continuous problem. © 1971 Plenum Publishing Corporation.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Ziv Bar-Yossef, T.S. Jayram, et al.
Journal of Computer and System Sciences
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
David W. Jacobs, Daphna Weinshall, et al.
IEEE Transactions on Pattern Analysis and Machine Intelligence