William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Joel L. Wolf, Mark S. Squillante, et al.
IEEE Transactions on Knowledge and Data Engineering
Alessandro Morari, Roberto Gioiosa, et al.
IPDPS 2011
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev