About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Chemical Physics Letters
Paper
Absolute coverage and decomposition kinetics of Mono-, Di-, and tri-hydride phases on Si(111)-(7×7)
Abstract
Static secondary ion mass spectrometry (SSIMS) is shown to probe directly the coordination of surface silicon atoms to adsorbed hydrogen. Signal intensities of secondary ions, SiD+, SiD2+, and SiD3+ observed in SSIMS following D atom adsorption on Si(111)-(7×7) are proportional to the coverages of SiD, SiD2, and SiD3, respectively. Temperature-programmed desorption is used to quantify the three coverages. The SiD3+ signal in temperature-programmed SSIMS is used to measure the first-order EA (31±2 kcal mol-1) and v (1×1010±1 s-1) for surface SiD3 decomposition. © 1989.