Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
It is shown that if one uses a carefully defined concept of stability (Stewart, G.W., Introduction to matrix computations, Academic Press, New York and London, 1973) then Horner's rule for the evaluation of a polynomial and some other evaluation methods are not always stable. A method is presented which is always stable. The operations count for this method is the same as that for Horner's rule. The method is generalized to apply to all rational functions of one variable. © 1983 Springer-Verlag.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
L Auslander, E Feig, et al.
Advances in Applied Mathematics
Ronen Feldman, Martin Charles Golumbic
Ann. Math. Artif. Intell.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010