Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976
Fan Zhang, Junwei Cao, et al.
IEEE TETC
Nanda Kambhatla
ACL 2004