Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering