G. Klärner, J.-I. Lee, et al.
Chemistry of Materials
G. Klärner, J.-I. Lee, et al.
Chemistry of Materials
K. Wago, O. Züger, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
C.R. Moylan, R.D. Miller, et al.
LEOS 1995
D.A.McL. Smith, S.A. Williams, et al.
Journal of Physical Chemistry