R. Ghez, M.B. Small
JES
Low energy electron microscopy (LEEM) has developed into one of the premier techniques for in situ studies of surface dynamical processes, such as epitaxial growth, phase transitions, chemisorption and strain relaxation phenomena. Over the last three years we have designed and constructed a new LEEM instrument, aimed at improved resolution, improved diffraction capabilities and greater ease of operation compared to present instruments.
R. Ghez, M.B. Small
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
J.Z. Sun
Journal of Applied Physics