Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We develop a multilevel method suitable for solving operator equations. This method combines the multiresolution structure of the spaces used to solve the operator equation with a Gauss-Seidel strategy to solve the associated matrix equations. We prove that this multilevel scheme has an optimal order of convergence and provide an application of it to the solution of second kind integral equations. © 2001 Academic Press.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shu Tezuka
WSC 1991
James Lee Hafner
Journal of Number Theory
John S. Lew
Mathematical Biosciences