Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We develop a multilevel method suitable for solving operator equations. This method combines the multiresolution structure of the spaces used to solve the operator equation with a Gauss-Seidel strategy to solve the associated matrix equations. We prove that this multilevel scheme has an optimal order of convergence and provide an application of it to the solution of second kind integral equations. © 2001 Academic Press.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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