Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We develop a multilevel method suitable for solving operator equations. This method combines the multiresolution structure of the spaces used to solve the operator equation with a Gauss-Seidel strategy to solve the associated matrix equations. We prove that this multilevel scheme has an optimal order of convergence and provide an application of it to the solution of second kind integral equations. © 2001 Academic Press.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Matthew A Grayson
Journal of Complexity
Yixiong Chen, Weichuan Fang
Engineering Analysis with Boundary Elements
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010