Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011