Jaejune Jang, Edwin C. Kan, et al.
IEEE Journal of Solid-State Circuits
Paper
A General Solution Method for Two-Dimensional Nonplanar Oxidation
Abstract
Two-dimensional oxidation is a moving-boundary problem involving steady-state oxidant diffusion and incompressible viscous flow. To solve the kinetic equations for the two-dimensional oxidation model, this work introduces a general numerical method that combines pressure/velocity iteration with a boundary-value technique. © 1983 by The Institute of Electrical and Electronics Engineers, Inc.