William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
A domain decomposition scheme based on equivalence theorem
Abstract
A domain decomposition scheme based on the equivalence theorem and the method of moments is introduced. The unknowns on every subscatterer are transferred to the unknowns on its surrounding equivalent surface. With this scheme, both the number of unknowns and the memory usage are reduced. © 2006 Wiley Periodicals, Inc.
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