A cost-effective method for minimizing the sphere-of-confusion error of x-ray microdiffractometers

Abstract

Microdiffractometers are used to obtain x-ray diffraction data from regions that are tens of microns or less in size. If a microdiffractometer's rotation circles do not share the same center, or if the feature of interest on a sample does not lie at the center of all rotations, the sample feature will, upon rotation of the diffractometer circles, precess through a finite volume known as the sphere of confusion (SoC). If the size of the beam used for diffraction analysis is smaller than the SoC diameter, the beam may actually move off the region of interest. In this article, we describe a new technique, based on x-ray fluorescence imaging and coordinate transforms, which can maintain the sample position to within ±6 μm over all rotations even when a commercial diffractometer is used as the base for the microdiffractometer system. In this scheme, a grid held in place on the specimen surface is mapped using fluorescent radiation at various sample tilts. The transformation matrices, which relate the grid coordinates to the sample stage coordinates at different sample tilts, can then be used to bring the sample stage into coincidence with its original position. © 1999 American Institute of Physics.