Indranil R. Bardhan, Sugato Bagchi, et al.
JMIS
No abstract available.
Indranil R. Bardhan, Sugato Bagchi, et al.
JMIS
Erich P. Stuntebeck, John S. Davis II, et al.
HotMobile 2008
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Photomask and Next-Generation Lithography Mask Technology 2004
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SPIE Advances in Semiconductors and Superconductors 1990