Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Sabine Deligne, Ellen Eide, et al.
INTERSPEECH - Eurospeech 2001