Publication
ICMTS 2012
Conference paper

32nm yield learning using addressable defect arrays

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Abstract

The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology. © 2012 IEEE.

Date

24 May 2012

Publication

ICMTS 2012

Authors

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