Measuring Local CD Uniformity in EUV vias with scatterometry and machine learning
- Dexin Kong
- Daniel Schmidt
- et al.
- 2020
- SPIE Advanced Lithography 2020
Conference paper
Publications
971 results for Semiconductors
Weighted sampling for combined model selection and hyperparameter tuning
- Dimitrios Sarigiannis
- Thomas Parnell
- et al.
- 2020
- AAAI 2020
Conference paperFull Bottom Dielectric Isolation to Enable Stacked Nanosheet Transistor for Low Power and High Performance Applications
- J. Zhang
- S. Pancharatnam
- et al.
- 2019
- IEDM 2019
Conference paperDigitalization concepts to optimize O&M strategies in Offshore Wind Energy
- Michael Nidd
- Moritz Gräfe
- et al.
- 2019
- WindEurope Offshore 2019
Invited talkWeight Programming in DNN Analog Hardware Accelerators in the Presence of NVM Variability
- Charles Mackin
- Sidney Tsai
- et al.
- 2019
- Advanced Electronic Materials
PaperDirected self-assembly of block copolymers for 7 nanometre FinFET technology and beyond
- Charlie Liu
- Elliott Franke
- et al.
- 2018
- Nature Electronics
PaperQiskit Backend Specifications for OpenQASM and OpenPulse Experiments
- David McKay
- Thomas Alexander
- et al.
- 2018
- arXiv
PaperDetection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers
- Luciana Meli
- Ravi Bonam
- et al.
- 2017
- IEEE Trans Semicond Manuf
PaperControl and Implementation Aspects of a Multiphase Inductor-Based FIVR in 14 nm Bulk CMOS for Microprocessor Applications
- Riduan K. Aljameh
- Pedro A. M. Bezerra
- et al.
- 2016
- PwSoC 2016
Conference paperUsing Graph-Based CSP to Solve the Address Translation Problem
- Merav Aharoni
- Yael Ben-Haim
- et al.
- 2016
- CP 2016
Conference paper