Vertical Travelling Scatterometry for Metrology on Fully Integrated Devices
- D. Schmidt
- Manasa Medikonda
- et al.
- 2022
- SPIE Advanced Lithography 2022
Conference paper
Publications
964 results for Semiconductors
Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
- John M. Papalia
- Devi Koty
- et al.
- 2022
- SPIE Advanced Lithography 2022
Conference paperThroughput vs. Yield: reviewing the metrology needs for stochastics-aware process window analysis (SA-PWA)
- Jennifer Church
- Luciana Meli
- 2022
- SPIE Advanced Lithography 2022
Invited talkKubeFlux: An HPC scheduler plugin for Kubernetes
- Claudia Misale
- Daniel Milroy
- 2022
- KubeCon + CloudNativeCon EU 2022
Conference paperSpin-Transfer-Torque MRAM: the Next Revolution in Memory
- 2022
- IMW 2022
Invited talkFPGA-driven High Density Photonic Reservoir Computing
- Hidetoshi Numata
- Jean Benoit Heroux
- et al.
- 2022
- ICEP 2022
Conference paperTowards Enhanced Sustainability in Future Plasma Processes
- Nathan Marchack
- Hiro Miyazoe
- et al.
- 2022
- MRS Spring Meeting 2022
Invited talkDeveloping Analog Hardware for Cloud and Edge Computing
- Stefano Ambrogio
- 2022
- MRS Spring Meeting 2022
Invited talkScalable Conductive Metal-Oxide/ HfO2-Based Bilayer ReRAMs for Analog In-Memory Computing
- Tommaso Stecconi
- Youri Popoff
- et al.
- 2022
- MRS Spring Meeting 2022
TalkScalability and Functionality of 2- and 3-Terminals BEOL-Compatible Ferroelectric Synaptic Weights
- Laura Bégon-Lours
- Mattia Halter
- et al.
- 2022
- MRS Spring Meeting 2022
Talk