Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si
- S.-E. Hörnström
- A. Charai
- et al.
- 2004
- Surface and Interface Analysis
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19 results at Surface and Interface Analysis
A possible solution to the problem of compositional change with ion‐bombarded oxides
- Imre Bertóti
- Roger Kelly
- et al.
- 2004
- Surface and Interface Analysis
Investigation of gallium arsenide multilayer structures using a tunnelling microscope combined with a UHV‐SEM
- O. Albrektsen
- H. Salemink
- 2004
- Surface and Interface Analysis
Quantitative time‐of‐flight secondary ion mass spectrometry of a perfluorinated polyether
- David E. Fowler
- Roboert D. Johnson
- et al.
- 2004
- Surface and Interface Analysis
A comparative study of SIMS depth profiling of boron in silicon
- J.B. Clegg
- A.E. Morgan
- et al.
- 2004
- Surface and Interface Analysis
On the role of Gibbsian segregation in causing preferential sputtering
- Roger Kelly
- 2004
- Surface and Interface Analysis
ToF-SIMS studies of nanoporous PMSSQ materials: Kinetics and reactions in the processing of low-K dielectrics for ULSI applications
- P. Lazzeri
- G.W. Rubloff
- et al.
- 2004
- Surface and Interface Analysis
Surface potential studies of self-assembling monolayers using Kelvin probe force microscopy
- J. Lü
- L. Eng
- et al.
- 1999
- Surface and Interface Analysis
Conservative and dissipative interactions in dynamic force microscopy
- U. Dürig
- 1999
- Surface and Interface Analysis