Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
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221 results at Microelectronic Engineering
Scaling silicon MOS devices to their limits
- S.J. Wind
- D.J. Frank
- et al.
- 1996
- Microelectronic Engineering
Micromechanical structures for data storage
- T.C. Reiley
- L.-S. Fan
- et al.
- 1995
- Microelectronic Engineering
Atomic-scale analysis of quantum nanostructures with the STM
- M. Johnson
- M. Pfister
- et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- D.J. DiMaria
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- Juan R. Maldonado
- Ron DellaGuardia
- et al.
- 1995
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
Fabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- K.Y. Lee
- K. Ismail
- et al.
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- G.M. Wallraff
- John M. Hutchinson
- et al.
- 1995
- Microelectronic Engineering