Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

A Report on Tutorials and Tech-Briefings co-located with ISEC 2021
- - Atul Kumar
  - Subhrakanta Panda
- 2021
- ISEC 2021
Privacy-preserving data sharing and adaptable service compositions in mission-critical clouds
- - Bharat Bhargava
  - Pelin Angin
  - et al.
- 2021
- ISIC 2021
Effect of high NA "half-field" printing on overlay error
- - Allen Gabor
  - Martin Burkhardt
  - et al.
- 2021
- SPIE Advanced Lithography 2021
OCD enhanced: Implementation and validation of spectral interferometry for nanosheet inner spacer indentation
- - Daniel Schmidt
  - C. Durfee
  - et al.
- 2021
- SPIE Advanced Lithography 2021
In-line Raman spectroscopy for stacked nanosheet device manufacturing
- - Daniel Schmidt
  - C. Durfee
  - et al.
- 2021
- SPIE Advanced Lithography 2021
EUV single exposure via patterning at aggressive pitch
- - Jing Guo
  - Jennifer Church
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Speeding up OPC by leveraging existing designs with machine learning
- - Cheng Chi
  - Julian Dolby
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Effect of surface temperature on GeSbTe damage formation during plasma processing
- - L. Buzi
  - J. M. Papalia
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Contact local CD uniformity optimization through etch shrink
- - Eric Miller
  - Junling Sun
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Process trace analytics for process development
- - Robert J. Baseman
  - Fateh A. Tipu
  - et al.
- 2021
- SPIE Advanced Lithography 2021