CLEO_SI 2019
Conference paper

Trace-gas spectroscopy of methane using a monolithically integrated silicon photonic chip sensor

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We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.