Publication
CLEO_SI 2018
Conference paper

GaP-on-insulator as a platform for integrated photonics

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Abstract

We present a complete process flow for fabrication of integrated GaP-on-insulator photonic devices via direct wafer bonding of epitaxial films. High-fidelity patterning enables a range of applications, such as waveguide resonators and photonic crystal cavities.

Date

13 May 2018

Publication

CLEO_SI 2018

Authors

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