Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
- Krystelle Lionti
- Noel Arellano
- et al.
- Chemistry of Materials
Rudy Wojtecki is a Principal Research Staff Member and Manager of Electronic Materials and Process Technology at IBM Almaden Research Center. He leads efforts on area selective depositions, smart packaging materials and manages the R&D of a joint venture commercializing a technology for chemical recycling. He has more than 140 patents/patent applications and 32 peer-reviewed publications. He was recognized in 2022 by the American Vacuum Society as the recipient of the Peter B. Mark Award for “For outstanding contributions towards the future of computing through the application of supramolecular and dynamic covalent chemistries in the design of surfaces for area selective depositions”, in 2022 as Chemical and Engineering News – Talented-12 – boundary breaking young scientists, by IBM as a Master Inventor and by the American Chemical Society (ACS) with the Young Investigator’s Award in 2015. He serves on the external advisory boards for the Cornell University Nanofab and the University of Chicago Materials Research Science and Engineering Center. In 2022 he served as Chair of the Area Selective Deposition Workshop. In 2020 as a member of the planning committees for the ACS Young Investigator’s Symposium and in 2019 for the National Academy of Science DMMI Quantum Technologies Workshop.